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We summarized the current growth position from the high-electrical power DUV laser both on the wavelength of FHG in the 1-μm laser and at 193 nm. The modern improvement from the strong-condition/fiber laser, plus the nonlinear optical crystals, prompts not merely the typical power but also the beam good quality (coherence) in the DUV lasers to an unprecedented level.
The crucial element trouble of ultraviolet coherent light resource mostly concentrates on the event of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal is without doubt one of the disorders for frequency transformation, so The expansion, size, problems resistance, conversion effectiveness and allowable parameter variety of nonlinear optical crystal are needed A lot more.
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On one other aspect, the power scaling of the NIR laser is yet another factor to raise the average ability on the 193-nm DUV laser. A result of the lack of the higher-ability amplification Resolution of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) might be applied to establish a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength together with getting relative larger electricity [21]. Recently, a diamond Raman laser confirmed its means in achieving a large electricity and also a superior conversion performance within the 1st Stokes of the one-μm laser [22,23], which means the chance to be used during the 193-nm DUV laser era as a consequence of its significant Raman get and huge frequency shift.
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Tunable ultraviolet laser source based upon good-point out dye laser technological know-how and CsLiB6O10 harmonic era
The conversion effectiveness from fundamental NIR to DUV click here is from 5% to 36% according to the documented results in Table one. Rising the conversion efficiency will decrease the load on the look and setup of the basic laser amplifier as well as the electrical ability consumption. A superb beam high-quality of the fundamental laser will even lead into the increasing in the conversion effectiveness together with the right ability depth of your NIR and environmentally friendly laser in the SHG and FHG procedure, respectively. The highest conversion efficiencies from NIR to green and green to DUV laser by usage of CLBO crystal are 70% and all over fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from basic to DUV.
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